The ATF5
WDI’s ATF5 is a high speed, high accuracy, autonomous digital autofocus sensor. Its “Smart Sensor Architecture” (SSA) incorporates a semiconductor laser, built-in CMOS image sensor, FPGA and microprocessor for fast digital image processing. By projecting multiple laser dots onto the sample and digitally processing the image, the ATF5 provides fast and accurate measurements of the distance and direction to focus. This information can then be output directly to WDI’s MCM+ or MCZ controller, or to any compatible controller.
High Accuracy At Fast Speeds
WDI’s ATF5 sensors project their focusing laser directly through the objective lens of the microscope. This “Through The Lens” (TTL) technique allows the ATF5 to provide extremely accurate autofocus, with a success rate typically higher than 99%. The ATF5’s on-board digital processing allows it to couple this accuracy with extremely high speeds.
Static or Dynamic Autofocus
The ATF5 is continually assessing distance and direction to focus, updating its data every 0.6 milliseconds. This allows the sensor to keep samples in focus regardless of whether they are stationary or in motion. This powerful tracking autofocus makes the ATF5 perfect for scanning very large specimens quickly and precisely.
Maximum Flexibility
By projecting multiple reference spots, the AFT5 sensor operates equally effectively on patterned and un-patterned specimens. This makes it ideal for media such as TFT arrays and photo masks. The ATF5 also automatically adjusts its laser intensity and sensor exposure time, allowing it to adapt from low reflectivity (down to 1%) to highly reflective (99%) surfaces. It is compatible with objectives from 2X to 100X, and wavelengths including UV, NUV and NIR. The ATF5 can also achieve focusing with a programmable offset function, allowing inspection of both the top and bottom surfaces of a transparent medium.
Easy Integration
All of the sensors in WDI’s ATF family are designed with ease of integration in mind. They are compatible with most types of infinity corrected microscope objectives. The ATF5 can be purchased as a full autofocus system, integrated with either WDI’s MCM+ controller for driving an external Z stage or MCZ controller which includes the ability to drive a two-phase stepper motor for Z actuation. All WDI’s ATF sensors have small, standardized footprints and connections, and can output in either analog or digital formats, making them both easy to install and easy to upgrade as application requirements evolve.